We supply various sputtering targets such as SiO,，SiO2，TiO2,ZrO2，HfO2，TiOx，Ti3O5，Nb2O5，Ta2O5，Y2O3,NbF3，BaF2，CeF3，MgF2， LaF3,YF3，YbF3，ErF3 ,etc...
Aluminum Doped ZINC OXODE SPUUTER TARGET
Chemical formula：AZO ZnO：Al=98：02 wt%
AZO ZnO：Al=97：03 wt%
AZO ZnO：Al=95：05 wt%
AZO ZnO：Al=90：10 wt%
Or as requested
Melting point：1800℃
| Apperance | Dark Green,No obvious discolor |
| Porosity or inclusions | The target surface clean without oil ,watermark,finger prints;without eye visible defects such as scratches,cracks,and other deformations .Inclusions or single voids in the surface should not be larger than 2.0mm²Inclusion or void of (1.0~2.0)mm² is not more than one in the same segment |
| Relative Density | ≥99% |
| Surface Quality(Ra) | ≤1.6um |
| Grain Size | Average grain size is (10~20)um |
| Dimension(mm) | According to the drawing |
Target Bonding
| Bonding Material | Metal Solder |
| Gap Between Segments | (0.1~0.3)mm for planar targets |
| Bonding Ratio | No less than 95% for rotatable targets |
| Position Allowance | ≤0.5mm |
| Wrap for Planar Target | ≤2.0mm/m |
Backing Plate
Material | T2/TU2 cooper plate for planar target if without particular requirements |
Apperance | No scrathes on the sealling section and surface |
Dimension | Accprding to the drawing |
Marking | According to request |
Analysis Method and Tools
Purity | ICP |
Metallic Element Content | ICP |
Particle Size | Coulter |
Dimension | Callipers |
Density | Archimedes |
Surface Finish | Roughness Gauge |
Apperance | Visual |
Bonding Ratio | Ultrasonic Detection |
Wrap | Straight Gauge and Filer Gauge |
Weight | Electronic Balance |
Please send us your request with below details to " sales@mdlmaterials.com"
1. Size /Tolerance ( or drawing )
2. Purity
3. Quantity
