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Free-standing GaN Substrate (Customized Size)

We can provide high temperature superconducting thin film substrate, magnetic thin films and ferroelectric thin film substrate, semiconductor crystal, optical crystal, laser crystal materials, at the same time provide orientation, crystal cutting, grinding, polishing and other processing services to domestic and foreign universities and research .

Free-standing GaN Substrates ( Customized Size)

Specifications

ItemGaN-FS-10GaN-FS-15
Dimensions10.0mm x 10.5mm14.0mm x 15.0mm
Marco Defect Density
A Level0 cm-2
B Level≤2cm-2
Thickness
Rank 300300± 25um
Rank 350350± 25um
Rank 400400± 25um
OrientationC-axis(0001)±0.5°
TTV(Total Thickness Variation)≤15um
BOW≤20um
Conuction TypeN-type
Semi-Insulating
Resistivity(300K)<0.5Ω.cm>106Ω.cm
Dislocation DensityLess than 5 x 10cm-2
Useable Surface Area>90%
Polishing

Front Surface: Ra<0.2nm.Epi-ready polished

Back Surface:Fine ground

PackagePackage in a class 100 clean room environment ,in single wafer containers ,under a nitrogen atmosphere.

Free-standing GaN Substrate (Customized Size)

5.0mm x 5.5mm is available and other size can be customized.

ItemGaN-FS-N-1.5
DimensionsΦ25.4mm±0.5mmΦ38.1mm± 0.5mmΦ40.0mm ±0.5mmΦ45.0mm ±0.5mm
Marco Defect DensityA Level

≤2cm-2

B Level>2cm-2
Thickness350±25um
OrientationC-axis(0001)±0.5°
Orientation

(1-100)±0.5°

8±1mm

(1-100)±0.5°

12±1mm

(1-100)±0.5°

14±1mm

(1-100)±0.5°

14±1mm

Secondary Orientation Flat

(11-20)±3°

4±1mm

(11-20)±3°

6±1mm

(11-20)±3°

7±1mm

(11-20)±3°

7±1mm

TTV(Total Thickness Variation)≤15um
BOW≤20um
Conduction TypeN-TypeSemi-Insulating
Resistivity(300K)<0.5Ω.cm>106Ω.cm
Dislocation DensityLess than 5 x 106 cm-2
Useable Surface Area>90%
Polishing

Front Surface : Ra<0.2nm. Epi-ready polished

Back Surface: Fine ground

PackagePackage in a class 100 clean room environment ,in single wafer containers ,under a nitrogen atmosphere .

Free-standing GaN Substrate (Customized Size)

Product Name: Free-standing GaN Substrate (Customized Size)

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