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2 Inch Free-Standing GaN Substrates

We can provide high temperature superconducting thin film substrate, magnetic thin films and ferroelectric thin film substrate, semiconductor crystal, optical crystal, laser crystal materials, at the same time provide orientation, crystal cutting, grinding, polishing and other processing services

2 Inch Free-Standing GaN Substrates

ItemGaN-FS-NGaN-FS-SI
Dimensions Φ50mm±1mm
Marco Defect DensityA Level≤2cm-2
B Level>2 cm-2
Thickness350±25um
OrientationC-axis(0001)±0.5°
Orientation Flat(1-100)±0.5°,16.0±1.0mm
Secondary Orientation Flat(11-20)±3°,8.0±1.0mm
TTV(Total Thickness Variation)≤15um
BOW≤20um
Conduction TypeN-TypeSemi-Insulating
Resistivity(300K)<0.5Ω.cm>106 Ω.cm
Dislocation DensityLess than 5 x 106 cm-2
Useable Surface Area>90%
Polishing

Front Surface: Ra<0.2nm. Epi-ready polished

Back Surface:Fine ground

PackagePackaged in a class 100 clean room environment ,in single wafer containers ,under  nitrogen atomsphere.

2 Inch Free-Standing GaN Substrates

Product Name: 2 Inch Free-Standing GaN Substrates

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